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    Gas Sensing Using Polymer-Functionalized Deformable Fabry–Perot Interferometers

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    St.Gelais_et_al_2013_Gas_Sensing_Using_Polymer.pdf (1.254Mb)
    Date
    2016-03-03
    Author
    St-Gelais, Raphael
    Peter, Yves-Alain
    Mackey, Gillian
    Saunders, John
    Zhou, Jingjing
    Leblanc-Hotte, Antoine
    Poulin, Alexandre
    Barnes, Jack A.
    Loock, Hans-Peter
    Brown, R. Stephen
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    Abstract
    We report a chemical vapor sensor in which polymer swelling, upon analyte absorption, is used to deform an on-chip silicon Fabry–Perot interferometer (FPI). The magnitude of the deformation, recorded through the resonance wavelength shift, is proportional to the analyte concentration in accordance with a simplified analytical model and with finite element simulations. Conventional and phenyl-doped polydimethylsiloxane (PDMS) polymers are used to functionalize different interferometers, which are tested for the detection of two volatile organic compounds, i.e. m-xylene and cyclohexane. The detection of m-xylene concentrations down to 34 ppm—limited by our flow-meter setup—is achieved experimentally. Based on the sensitivities and the noise characteristics of the devices, limits of detection (LODs) of 1.6 ppm m-xylene and 6.3 ppm cyclohexane are expected.
    URI for this record
    http://hdl.handle.net/1974/14103
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