Effects of Substrate Temperature on Indium Gallium Nitride Nanocolumn Crystal Growth

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Date
2011
Authors
Keating, S.
Urquhart, M. G.
McLaughlin, D. V. P.
Pearce, Joshua M.
Keyword
indium gallium nitride , nanocolumn , crystal growth , substrate temperature
Abstract
Indium gallium nitride films with nanocolumnar microstructure were deposited with varying indium content and substrate temperatures using plasma-enhanced evaporation on amorphous SiO2 substrates. FESEM and XRD results are presented, showing that more crystalline nanocolumnar microstructures can be engineered at lower indium compositions. Nanocolumn diameter and packing factor (void fraction) was found to be highly dependent on substrate temperature, with thinner and more closely packed nanocolumns observed at lower substrate temperatures.
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