A Fabry-Perot Refractometer for Chemical Vapor Sensing by Solid-Phase Microextraction
Barnes, Jack A.
Brown, Robert Stanley
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The contour lithography method  is used to improve the fabrication yield of previously demonstrated  microfluidic Fabry-Perot (FP) refractive index (RI) sensors. The sensors are then coated with polydimethylsiloxane (PDMS) based polymers to detect vapor analytes by solid-phase microextraction (SPME). Preliminary characterization of devices coated with two different polymers and exposed to xylenes vapors yields a maximum sensitivity of 0.015 nm/ppm and a detection limit below 120 ppm.