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dc.contributor.authorYang, Pengen
dc.date2009-06-30 16:58:49.304
dc.date2009-07-02 16:26:48.093
dc.date2009-07-03 16:17:02.633
dc.date.accessioned2009-07-07T19:02:55Z
dc.date.available2009-07-07T19:02:55Z
dc.date.issued2009-07-07T19:02:55Z
dc.identifier.urihttp://hdl.handle.net/1974/1981
dc.descriptionThesis (Master, Mechanical and Materials Engineering) -- Queen's University, 2009-07-03 16:17:02.633en
dc.description.abstractThis thesis describes a finite element analysis (FEA) model of an indirect heating thermal actuator. The heat transfer mechanisms are investigated and the conductive heat transfer is found to be the dominant heat transfer mode. A model simplification method is discussed and used in the analysis to reduce the degrees of freedom and avoid meshing failures. The device is fabricated with the MetalMUMPs process. Measurements of the displacement as a function of the driving voltage are made to verify the FEA model. The results show that the simulation result of the FEA model produced a reasonable agreement with the experimental data. The difference between the FEA result and test result is investigated. A novel thermal actuator with integrated capacitive position sensor is also investigated. This new thermal actuator with an integrated capacitive sensor uses the indirect heating thermal actuator discussed in the first part of the thesis to achieve a new integration method. The displacement of the actuator provided by the sensor enables a feedback control capability. The analytical model, FEA and test results for the capacitive sensor are presented to validate the design concept. The test results show a reasonable agreement with the analytical analysis and the FEA. Finally, a manual displacement tuning application and a PI feedback control application with the designed thermal actuator with integrated capacitive sensor are documented.en
dc.format.extent2088762 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoengen
dc.relation.ispartofseriesCanadian thesesen
dc.rightsThis publication is made available by the authority of the copyright owner solely for the purpose of private study and research and may not be copied or reproduced except as permitted by the copyright laws without written authority from the copyright owner.en
dc.subjectMEMSen
dc.subjectThermal Actuatoren
dc.subjectCapacitive Sensoren
dc.subjectIntegrationen
dc.titleDevelopment of Micro Thermal Actuator with Capactive Sensoren
dc.typethesisen
dc.description.degreeM.A.Sc.en
dc.contributor.supervisorMechefske, Chris K.en
dc.contributor.supervisorLai, Yongjunen
dc.contributor.departmentMechanical and Materials Engineeringen
dc.degree.grantorQueen's University at Kingstonen


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