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dc.contributor.authorLeduc, Vincent Louis Philippe
dc.contributor.otherQueen's University (Kingston, Ont.). Theses (Queen's University (Kingston, Ont.))en
dc.date2007-09-28 10:13:56.094en
dc.date.accessioned2007-09-28T18:01:25Z
dc.date.available2007-09-28T18:01:25Z
dc.date.issued2007-09-28T18:01:25Z
dc.identifier.urihttp://hdl.handle.net/1974/726
dc.descriptionThesis (Master, Physics, Engineering Physics and Astronomy) -- Queen's University, 2007-09-28 10:13:56.094en
dc.description.abstractThis thesis presents the design and theoretical modeling of an aluminum gallium arsenide/gallium arsenide heterostructure from which suspended nanoscale mechanical resonators with embedded two-dimensional electron gas (2DEG) can be made. The mechanical characteristics of the resonator and the piezoelectric actuation scheme are investigated using finite-element modeling. For a 836 nm-long, 250 nm-wide and 164 nm-thick beam with gold electrodes on top, out-of-plane flexural vibrations are verified to be piezoelectrically excited at the beam's fundamental frequency of 925.6 MHz. Fabrication recipes for the making of ohmic contacts to the 2DEG, Hall bars and suspended structures are developed using the designed crystal structure. Electrical properties of the 2DEG are evaluated in both large, unsuspended structures as well as in sub-micron size suspended structures. It is found that the 2DEG has a reasonable electron density of 7.04E11 cm^-2 and electron mobility of 1.72E5 cm^2/(V s).en
dc.format.extent2596056 bytes
dc.format.mimetypeapplication/pdf
dc.languageenen
dc.language.isoenen
dc.relation.ispartofseriesCanadian thesesen
dc.rightsThis publication is made available by the authority of the copyright owner solely for the purpose of private study and research and may not be copied or reproduced except as permitted by the copyright laws without written authority from the copyright owner.en
dc.subjectNEMSen
dc.subjectDisplacement sensingen
dc.subject2DEGen
dc.subjectPiezoelectricityen
dc.subjectGaAsen
dc.titleDesign, fabrication and characterization of a suspended heterostructureen
dc.typethesisen
dc.description.degreeMasteren
dc.contributor.supervisorKnobel, Roberten
dc.contributor.departmentPhysics, Engineering Physics and Astronomyen


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